ARTIGO

Autores: Ricardo dos Santos França

Abstract: Recent activities at INMETRO flatness interferometer measurement and calibration systems included pre-processing steps applied over digitized 2D interferogram images, as suitable preparation for three recently developed nanometrological estimation algorithms based in MATLAB. Those algorithms have been updated and optimized to reduce execution times and extra numeric distortions. Comparisons between phase map results from raw and preprocessed images are shown.


Download do Artigo